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Vacuum Pump
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For evacuation of the reactor cylinder up to 10 litres a two stage roughing pump is
recommended.
The larger the capacity, the shorter the cycle time but the more gas
is ionized and consumed.
Some samples are out-gassing significantly. For this reason a 5 m3
pump is recommended.
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If oxygen gas is used for the process, a special pump
or pump oil must
be used. Inside the pump oil mist can react chemically with oxygen and create an explosive
mixture.
There are three options to solve this problem:
A. The vacuum pump is operated with PPFE-oil (Fomblin). This oil does
not react with oxygen.
B. The vacuum pump is operated with di-ester oil. This is an attractive option
to the expensive and hazardous fomblin oil.
C. The vacuum pump is oil-free.
In case of using toxic gasses or gasses which ionize to toxic products,
the exhaust of the oil mist filter must be connected to a fume hood or
lead outside..
Pumps with a capacity of 5m3, 8m3 and 12m3
are standard for this application and available from GaLa Instrumente GmbH. |
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Pfeiffer
DUO 5
2-stage roughing pump, 5m3/h, 3x10-2 mbar
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*)Di-ester
oil
is recommended
for oxygen/air
gas applications.
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