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 Plasma |
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Home * Instruments / Technical Data * TEMprobeclean * Vacuum Pump * Literature |
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| Oxygen plasma is a highly efficient, low priced and easy to
use cleaning system also for TEM applications. TEM sample holders and
inorganic samples contaminated with carbonous material can be thoroughly
cleaned before or after analysis, leaving no residue. A plasma treatment with oxygen gas for 10-15 min. ashes residue-free carbon from exposed surfaces. This treatment results in extended contamination-free analysis time. The accuracy in quantification of thin sections is greatly improved. Furthermore, contaminations produced by the electron beam can be efficiently removed for optimal high resolution imaging or repetitive analysis (see literature 2-5). Plasma-ACE can be easily upgraded for cleaning TEM sample holders. The upgrade of the reactor door includes a TEM-specific sample holder port. This allows the introduction of the TEM sample holder into the plasma reaction zone. The advantages of plasma cleaning are obvious. The method is friendly to the environment because the cleaning process only produces carbon monoxide and/or carbon dioxide. Furthermore, the treatment is residue-free - mandatory in sensitive energy dispersive micro analysis or high resolution imaging. |
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