|
|
 Plasma |
Representations: |
|
Home * Instruments / Technical Data * TEMprobeclean * Vacuum Pump * Literature |
||
| |||||||
|
|
Plasma instruments with cylindrical or square reactors can be used for
applications like plasma cleaning, plasma ashing,
Plasma instruments for The flecto seriesInstruments of the flecto series have a rotating drum for plasma cleaning / plasma surface modification of small parts.
| |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| * dimensions housing: W 530 mm x h 400 mm x d 680 mm |
| * cylinder reactor stainless steel, Ø 210 mm x d 330 mm, volume approx. 11 litres |
| * rotating drum removable, Ø 160 mm x d 250 mm, volume 5 litres |
| * plasma generator approx. 100 W@ 24 KHz |
| * Pirani vacuum sensor (not suitable for aggressive gases!) |
| * gas supply and vacuum conditions electronically operated |
| * fully automatic control |
| * process parameters via digital input and monitoring on LED-display |
| * free parameters: vacuum, power, time |
| * mains supply 1KW, 230V/50Hz/16A |
| flecto 10RS
with serial interface RS232 or USB for uploading parameter recipes
or down loading process parameters (Windows 2000 or Windows XP) |
| For operation plasma instruments need
a Vacuum Pump Roughing vacuum pumps need a special di-ester oil for applications with oxygen. |
Instruments of the flecto series have a rotating drum for plasma cleaning / plasma surface modification of small parts.
| * cylindrical reactor stainless steel Ø 1100 mm x d 2500 mm, volume 2.400 litres | |||
| * rotating reactor for up to 8 sample cages, stainless steel, approx. 1000 mm l / 70 litres | |||
| * plasma generator 5 KW, 40 KHz | |||
| * Pirani vacuum sensor (not suitable for aggressive gases) | |||
| * process gas measured via 2 mass flow controllers | |||
| * fully automatic control via GE Fanuc QuickPanel | |||
| * programmable plasma application recipes to be stored and up-loaded | |||
| * process parameter digital
adjustable and displayed on TouchScreen display and modification of machinery data graphic display of instrument activities display and modification of set parameters display of process parameters display of all analogue and digital ports report of process with all vital data recipe library with numbers or names |
|||
| * free parameters vacuum, power, time | |||
| * mains supply 30 kW, 400 V/32 A, pressure air 6 bar, exhaust via Ø 40 mm hose, 0.5 bar process gas | |||
| optional modem for maintenance optional network card for data storage at distant location |
|||
| Vacuum system consisting of SogeVac300
& Roots pump WAU500 Roughing vacuum pumps need a special di-ester oil for applications with oxygen. |
|||
 |
 |
 |
 |
The instruments of the statuo series have a cylindrical reactor to be fitted with sample trays.
| * cylindrical reactor stainless steel Ø 400 mm x t 300 mm, volume approx. 40 litres |
| * loading of multiple sample trays, stainless steel |
| * plasma generator 1000 W, 40 KHz |
| * Pirani vacuum sensor (not suitable for aggressive gases) |
| * process gas measured via 2 mass flow controllers |
| * fully automatic control via GE Fanuc QuickPanel |
| * programmable plasma application recipes to be stored and up-loaded |
| * process parameter digital adjustable and
displayed on TouchScreen display and modification of machinery data graphic display of instrument activities display and modification of set parameters display of process parameters display of all analogue and digital ports report of process with all vital data recipe library with numbers or names |
| * free parameters vacuum, power, time |
| * mains supply 3 kW, 400 V/16 A, pressure air 6 bar, exhaust via Ø 40 mm hose, 0.5 bar process gas |
| optional modem for maintenance optional network card for data storage at distant location |
| Vacuum pump 25 m3/h,
chemical resistant Roughing vacuum pumps need a special di-ester oil for applications with oxygen. |
* cylindrical reactor, stainless steel, 300 litres
| The "Plasma-Spot" is a new development, which
settles between atmospheric and low pressure plasma.
Atmospheric plasmas or low pressure plasma is used for pre-treatment of surfaces in the polymer industry. The plasma cleans and modifies the surface for improved wetability, gluing or painting. Typical applications of Plasma-Spot are:
|
 active area result for wetability |
| ||||||
