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Home * Instruments / Technical Data * TEMprobeclean * Vacuum Pump * Literature

Plasma instruments with cylindrical or square reactors can be used for applications like plasma cleaning, plasma ashing,
plasma etching and plasma surface modification.

Plasma instruments for the lab ACE1-KHz / flecto 10
Industrial use / production: flecto 2.4 / statuo 40 / statuo 300 / Plasma-Spot

PlasmaACE1-KHz Frequency generator 24 KHz

   * simple to operate instrument for cleaning, etching, ashing, surface modification, etc.
   * reactor cylinder approx. 9,5cm Ø x approx. 21cm long, horizontal (1 litre)
   * stainless steel reactor with aluminium/glass door
   * efficient internal perforated electrode/antenna
   * automatic process, 10 programs with up to 5 process steps each,
      programs can be modified via USB interface
   * sturdy plastic foil keyboard for selecting program, start and stop
   * back illuminated colour display for program sequence
      blue: standby, green: process active, red: problem
   * proportional valve for controlled process gas leak
   * vacuum gauge, also to be used with aggressive gases
   * variable power setting in %, max. power 80 watts
   * automatic fine tuning (matching impedance)
   * electronic timer for process time, automatic termination of plasma process
      max. 99 h : 59 m : 59 s
   * free parameters : process time, power, process gas and pressure
   * 2 gas lines for process gas, one gas line for venting
   * USB communication port for program modification
   * width 40 cm, height 22 cm, deep 40 cm, approx. 20 kg


   * TEMprobeclean reactor door with port for TEM sample holder
   * TEM-specific vacuum port for TEM sample holder
   * Transformer for local electricity supply 110V/60Hz

PlasmaACE1KHz is a compact and good value instrument for laboratory use and mini series applications. The implemented KHz generator technique allows low cost electronics and automatic matching compared to components traditionally used in 13.56 MHz (RF) generator instruments.
Nevertheless, it can be used for most plasma application without compromising in results.

Most common applications include:

structuring or etching of surfaces
cleaning from organic contamination
ashing of organic components
surface modification (hydrophilic/hydrophobic)

The instrument works fully automatic with 10 stored programs.
Each program can include up to 5 variable process steps.

A program can consist of the following structure:

Start
Step 1: Plasma on for 12 minutes @ 0.1 mbar and 75% power, process gas CF₄
Step 2: Plasma on for 2 minutes @ 0.15 mbar and 30% power, process gas O₂
Step 3: Plasma on for 30 minutes @ 0.2 mbar and 50% power, process gas O₂
Step 4: …..
Step 5: …..
STOP and reactor vented, if wanted with bottled gas.

This ensures to also solve more difficult applications reproducibly with one-button-operation.
Existing programs can be modified and optimized to adapt to specific needs via an integrated USB port.

The flecto series

Instruments of the flecto series have a rotating drum for plasma cleaning / plasma surface modification of small parts.

flecto 10

* dimensions housing: w 530 mm x h 400 mm x d 680 mm

* cylinder reactor stainless steel, Ø 210 mm x d 330 mm, volume approx. 11 litres

* rotating drum removable, Ø 160 mm x d 250 mm, volume 5 litres

* plasma generator approx. 100 W@ 24 KHz

* Pirani vacuum sensor (not suitable for aggressive gases!)

* gas supply and vacuum conditions electronically operated

* fully automatic control

* process parameters via digital input and monitoring on LED-display

* free parameters: vacuum, power, time

* mains supply 1KW, 230V/50Hz/16A

flecto 10RS with serial interface RS232 or USB for uploading parameter recipes or down loading process parameters
(Windows 2000 or Windows XP)

For operation plasma instruments need a Vacuum Pump

Roughing vacuum pumps need a special di-ester oil for applications with oxygen.

Instruments of the flecto series have a rotating drum for plasma cleaning / plasma surface modification of small parts.

flecto 2.4

* cylindrical reactor stainless steel Ø 1100 mm x d 2500 mm, volume 2.400 litres
* rotating reactor for up to 8 sample cages, stainless steel, approx. 1000 mm l / 70 litres
* plasma generator 5 KW, 40 KHz
* Pirani vacuum sensor (not suitable for aggressive gases)
* process gas measured via 2 mass flow controllers
* fully automatic control via GE Fanuc QuickPanel
* programmable plasma application recipes to be stored and up-loaded
* process parameter digital adjustable and displayed on TouchScreen display and modification of machinery data graphic display of instrument activities display and modification of set parameters display of process parameters display of all analogue and digital ports report of process with all vital data recipe library with numbers or names
* free parameters vacuum, power, time
* mains supply 30 kW, 400 V/32 A, pressure air 6 bar, exhaust via Ø 40 mm hose, 0.5 bar process gas
optional modem for maintenance optional network card for data storage at distant location
Vacuum system consisting of SogeVac300 & Roots pump WAU500 Roughing vacuum pumps need a special di-ester oil for applications with oxygen.

The statuo series

The instruments of the statuo series have a cylindrical reactor to be fitted with sample trays.

statuo 40

14.10.2009

* cylindrical reactor stainless steel Ø 400 mm x t 300 mm, volume approx. 40 litres

* loading of multiple sample trays, stainless steel

* plasma generator 1000 W, 40 KHz

* Pirani vacuum sensor (not suitable for aggressive gases)

* process gas measured via 2 mass flow controllers

* fully automatic control via GE Fanuc QuickPanel

* programmable plasma application recipes to be stored and up-loaded

   * process parameter digital adjustable and displayed on TouchScreen
          display and modification of machinery data
          graphic display of instrument activities
          display and modification of set parameters
          display of process parameters
          display of all analogue and digital ports
          report of process with all vital data
          recipe library with numbers or names

* free parameters vacuum, power, time

* mains supply 3 kW, 400 V/16 A, pressure air 6 bar, exhaust via Ø 40 mm hose, 0.5 bar process gas

optional modem for maintenance
optional network card for data storage at distant location

Vacuum pump 25 m³/h, chemical resistant

Roughing vacuum pumps need a special di-ester oil for applications with oxygen.

statuo 300

* cylindrical reactor, stainless steel, 300 litres

Plasma-Spot

The "Plasma-Spot" is a new development, which settles between atmospheric and low pressure plasma.

Atmospheric plasmas or low pressure plasma is used for pre-treatment of surfaces in the polymer industry. The plasma cleans and modifies the surface for improved wetability, gluing or painting.

Typical applications of Plasma-Spot are:

Selective surface treatment before gluing
Selective surface treatment before printing
Selective surface treatment during repair of a gluing or repair of a damage of lacquer
Selective coating of surfaces (e.g. non-adhesive coating or sliding coatings)

active area result for wetability

Home * Instruments / Technical Data * TEMprobeclean * Vacuum Pump * Literature
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GaLa Gabler Labor Instrumente Handels GmbH
Dr. Jost Gabler
Hardtstrasse 91
D - 65307 Bad Schwalbach
Germany

Tel:       +49-6124-7279 420
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